Title: | ||
Authors: | Moon, Bongkon; Wang, Weisong; Park, Chan; Yuk, In-soo; Chun, Moo-Young; Jaffe, Daniel T. |
Title: | Near-infrared metrology of high-performance silicon immersion gratings | |
Authors: | Gully-Santiago, Michael; Wang, Weisong; Deen, Casey; Jaffe, Daniel |
Title: | Manufacturing of silicon immersion gratings for infrared spectrometers | |
Authors: | Wang, Weisong; Gully-Santiago, Michael; Deen, Casey; Mar, Douglas J.; Jaffe, Daniel T. |